Technical
Special technology to create ultra-fine and high-precision shapes
using "light" such as UV and X-rays
Photolithography is a technique for forming resin molds by irradiating (exposing) light on a photoresist (photosensitive resin) and developing it.
When a photomask is placed over the photoresist when irradiating with light, a photoresist with a shape that follows the pattern (two-dimensional figure) formed on the photomask is formed.
The important points in photolithography are " used light " and "irradiation technique".
By using our unique light irradiation technology such as X-ray irradiation, it can form resists of various shapes with unparalleled precision and sharpness.
By using special light such as X-rays, it is possible to form a structure with excellent dimensional accuracy that cannot be achieved by conventional lithography.
It is possible to obtain a shape with sharp edges and a smooth surface, which is difficult with other method of construction. Narrow pitch processing is also available.
With our unique irradiation technology, it is possible to create shapes that cannot be obtained by ordinary lithography, such as curved surfaces and multi-stage shapes.
The wall structure with a high aspect ratio is formed without distortion.In addition, the edges are sharp and the side walls are smoothly formed.
Pillars with a high aspect ratio are formed with a narrow pitch.
The edges are sharp and the side walls are smoothly formed.
The pillars can be erected vertically or tapered.
It is possible to form spherical shapes that are difficult to form with conventional photolithography, and the surface is finished smoothly.
It is possible to form sharp-edged shapes that are difficult to form with conventional photolithography.
It is also possible to provide a convex structure on the convex structure or a concave structure on the convex structure.
Metal precipitation technology using electrochemical reaction
Electroforming is a technique for depositing metal on a substrate while passing electricity through the conductive substrate in the electrolyte.
Electroform the substrate obtained by photolithography, then, the photoresist is removed and the precipitated metal layer is peeled off from the substrate to complete the product (metal thin film).
We synthesize the electrolytic solution by ourselves, and it is possible to create a metal with unique physical characteristics.
We have developed a Ni-based alloy that is biocompatible and has no cytotoxicity.
It is applied to cell filters. It can capture biological cells without killing them.
e have developed a material that is corrosion resistant and biocompatible.
It is applied to nozzles for nebulizer devices.
Nozzle constituent (metal ions) do not dissolve in the various sprayed liquids. It can be used safely
We have developed a material specializing for corrosion resistance that is applied to printer-related parts (nozzles, filters, etc.).
We have developed a metal with high elasticity and excellent durability Applicable to inspection probe that expands and contracts repeatedly.
We provide various parts using copper for fields that require non-magnetism.
We provide various parts using gold in the field of inspection and observation using X-rays.
Gold is also used for masks for X-ray lithography.
It is possible to add functionality by performing various film-forming on the product surface.
Our products are metal thin film parts. If it is difficult to use it as it is, it can be provided in the frame.
It is also possible to attach it to the frame or jig you provide, or we can propose a standard frame *.
* Example: Sieve (pasting a stainless-steel frame)
Filter (attached to stainless steel frame)
This is a technique for drilling holes in metal thin films using a punch with a tip of 0.020 mm or less.
It can also be applied to materials such as stainless steel that cannot be processed by electroforming.
The hole diameter accuracy is equivalent to electroforming technology, and the shape is smooth.
It is possible to suppress variations in product thickness and to remove protrusions on the product surface
Since scratches and burrs due to polishing are unlikely to occur, the quality of the product is not impaired.
Supports sizes up to 150x150 mm.
In X-ray lithography, we can manufacture masks (X-ray masks) to block X-rays.
By covering the resist with this mask, irradiating it with X-rays, and developing it, you can get sharp shapes that cannot be formed by conventional lithography.
We will manufacture it as a spray element by laminating our electroformed mesh and piezoelectric ceramic.
We also support for mass production.
It is also possible to attach it to the piezoelectric ceramic you supply, so please feel free to contact us.
Using a 3D printer, it is possible to manufacture housings and frames for using electroformed products.
We can design it according to the customer's request, or we can only perform molding using the 3D data sent by the customer.
Please contact us for materials and available sizes.
The following evaluations can be performed in-company on the finished product.
