Product
製品情報
Metal Mask for Vapor-Deposition Patterning
Thermal expansion coefficeient can be matched to substrates to reduce motion of pattern during deposition.
For vaporization deposition, repltace photolitho-graphy be metal mask system. Higher precision, low thermal expansion and island mask are available.
| Applications | 1.Vapor-Deposition of OEL 2.Patterning Electrodes of LED 3.Patterning Electrodes of ITO film 4.Various vaporization |
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| Features | Low thermal expansion, varous thermal expansion Tapered side wall Spiral pattern deposition Cost saving |
| Specifications | Pattern Dimension +/-1um Position, Pitch +/-3um Over all size max 450mmx500mm Alternative technology of lift-off to save cost and to think Ecology. |